Pentakis(Dimethylamino)Tantalum(V) PDMAT 五(二甲基氨基)钽(V)

CAS 19824-59-0 MFCD01631286

化学结构图

19824-59-0
SMILES: CN(C)[Ta](N(C)C)(N(C)C)(N(C)C)N(C)C

化学属性

Mol. FormulaTa(N(CH3)2)5
Mol. Weight401.33
Melting Point100 °C (dec.) (lit.)
Appearance orange xtl.
Stabilitymoisture sensitive
Boiling Pointsubl. 100°C/0.1mm
Danger-Level-
pH-:-
Redox-

别名和识别编码

Chemical NamePentakis(Dimethylamino)Tantalum(V) PDWAT
MDL NumberMFCD01631286
PubChem Substance ID24873088
CAS Number19824-59-0
Synonym PDMAT PDMAT TADMA Ta(NMe2)5 Tantalum dimethylamide Ta(NMe2)5 五(二甲氨基)钽(V) Tantalum dimethylamide TADMA
Chemical Name Translation五(二甲基氨基)钽(V)
InChIKeyVSLPMIMVDUOYFW-UHFFFAOYSA-N
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分类

  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Micro/NanoElectronics, Tantalum,

相关文献及参考

  • 1. Son, K. -A. et. al. J. Vac. Sci. Technol. A 16 , 1670, (1998)
  • 2. Son, K. -A. et. al. Appl. Phys. Lett. 72 , 1187, (1998)

安全信息

WGK Germany3
GHS Symbol
Precautionary statements
  • P223 Keep away from any possible contact with water, because of violent reaction and possible flash fire. 远离任何与水接触的可能，因为会剧烈反应可能产生闪火。
  • P422 Store contents under… 存储目录在…之下。
  • P231+P232
  • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
  • P305+P351+P338
  • P370+P378
  • P402+P404
  • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
Hazard statements
  • H228 Flammable solid 易燃固体
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H260 In contact with water releases flammable gases which may ignite spontaneously 与水接触时释放可燃气体，可自燃。
Hazard Codes F,C
Personal Protective Equipment Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges
Signal word Danger
Safety Statements
  • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时，立即求医（可能时出示标签）；
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
  • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护；
  • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用（指明具体的消防器材种类，如果用水增加危险，注明“禁止用水”
  • S16 Keep away from sources of ignition - No smoking 远离火源，禁止吸烟；
Risk Statements
  • R11 Highly flammable 非常易燃
  • R14/15 Reacts violently with water, liberating extremely flammable gases 遇水剧烈反应，释放出高度可燃气体
  • R34 Causes burns 会导致灼伤
Restrict 危险品

系列性分类

  1. Chemical Synthesis 化学合成
  2. Catalysis and Inorganic Chemistry 催化剂和无机化学
  3. Tantalum - Catalysis and Inorganic Chemistry
  1. Materials Science 材料科学
  2. Micro/NanoElectronics - Materials Science
  3. Vapor Deposition Precursors - Micro/NanoElectronics
  4. CVD and ALD Precursors by Metal - Vapor Deposition Precursors
  5. Tantalum - CVD and ALD Precursors by Metal
  1. CVD & ALD Precursors
  1. CVD & ALD Precursors
  2. Tantalum
  1. Metal Alkylamides
  2. Tantalum

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